MEMS parallel plate variable capacitor for energy harvesting
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[ACCESS RESTRICTED TO THE UNIVERSITY OF MISSOURI AT REQUEST OF AUTHOR.] In recent years, there is a dramatic increase in use of portable, wireless sensors and actuators which are widely powered by batteries. However, these batteries have drawbacks such as limited energy, requiring replacement, maintenance, and recharges which could cause extra manpower, time and financial expenses. In order to address this problem, a novel MEMS parallel plate variable capacitor for energy harvesting was developed to extract (harvest) wasted energy from undesired mechanical vibrations. This makes it possible to have devices perpetual self-powered. The design, fabrication and characterization of this MEMS parallel plate variable capacitor is presented in details in this thesis. The result shows a promising future of this energy harvester.
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