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Spectroscopic ellipsometry analysis of nanoporous low dielectric constant films processed via supercritical carbon dioxide for next-generation microelectronic devices
(University of Missouri--Columbia, 2007)
My research will address issues at the back-end-of-line in microelectronics fabrication, specifically the need for Low-k extendibility. The International Roadmap for Semiconductors (2005) suggested that interconnect insulation must be replaced...