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Electrical Carrier Mobility Measurements of Amorphous Hydrogenated Boron Carbide Using Space-Charge-Limited Current Techniques
Within the field of neutron detection, there has been a push to develop solid-state direct-conversion devices. Amorphous hydrogenated boron carbide (a-BxC:Hy) is of particular interest for this purpose because it has a ...
Plasma-Enhanced Atomic Layer Deposition of Boron Carbide for Interconnect Applications
(University of Missouri -- Kansas City, 2018)
As the semiconductor industry endeavors to scale integrated circuit dimensions— decreasing layer thicknesses while increasing the aspect ratio of fillable features—the need for novel interconnect materials with highly ...