Browsing Graduate School - MU Theses and Dissertations (MU) by Title "Surface micromachined MEMS variable capacitor with two-cavity for energy harvesting"
Now showing items 1-1 of 1
-
Surface micromachined MEMS variable capacitor with two-cavity for energy harvesting
(University of Missouri--Columbia, 2013)In this research, a novel MEMS variable capacitor with two capacitive cavities for energy harvesting was developed that use the wasted energy associated with undesirable mechanical vibrations to power microelectronic sensors ...