Browsing 2006 MU theses - Freely available online by Title "Deposition and characterization of high permittivity thin-film dielectrics"
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Deposition and characterization of high permittivity thin-film dielectrics
(University of Missouri--Columbia, 2006)As integrated circuit (IC) devices scale to ever smaller nodes, replacing the front end dielectric has become a primary challenge. To enable greater device densities, control power consumption, and enhance performance, a ...