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dc.contributor.advisorWinholtz, Robert Andrew, 1961-eng
dc.contributor.authorRodrigues, Prajval Stepheneng
dc.date.issued2005eng
dc.date.submitted2005 Falleng
dc.descriptionThe entire dissertation/thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file (which also appears in the research.pdf); a non-technical general description, or public abstract, appears in the public.pdf file.eng
dc.descriptionTitle from title screen of research.pdf file viewed on (December 18, 2006)eng
dc.descriptionIncludes bibliographical references.eng
dc.descriptionThesis (M.S.) University of Missouri-Columbia 2005.eng
dc.descriptionDissertations, Academic -- University of Missouri--Columbia -- Mechanical and aerospace engineering.eng
dc.description.abstractThere is currently much interest in femtosecond scale laser interactions with materials. Comparison of the damage produced by the femtosecond laser pulses to the longer laser pulses is also of interest. This study examined the use of X-ray topography to investigate the effects and differences in laser irradiation damage to single crystal silicon. X-ray topography provides a unique method of examining the damage produced. Silicon wafer specimens were prepared with laser irradiated spots at different fluence levels with both nanosecond pulsed and femtosecond pulsed lasers. High-resolution X-ray topographs of the laser-irradiated spots on both groups of crystals were produced. The topographs were compared with the optical micrographs for feature size analysis. Damage within the irradiated region was characterized with rocking curve analysis. Analysis was also done to compare damage in the different (hkl) planes and for differentiating the type of damage done by nanosecond and femtosecond lasers.eng
dc.identifier.merlinb57454553eng
dc.identifier.urihttp://hdl.handle.net/10355/4248
dc.languageEnglisheng
dc.publisherUniversity of Missouri--Columbiaeng
dc.relation.ispartof2005 Freely available theses (MU)eng
dc.relation.ispartofcollectionUniversity of Missouri--Columbia. Graduate School. Theses and Dissertationseng
dc.subjectX-ray topography.eng
dc.subjectX-ray topographyeng
dc.subject.lcshFemtochemistryeng
dc.subject.lcshSiliconeng
dc.subject.lcshX-ray spectroscopyeng
dc.titleX-ray topography techniques for the analysis of laser irradiated siliconeng
dc.typeThesiseng
thesis.degree.disciplineMechanical and aerospace engineering (MU)eng
thesis.degree.grantorUniversity of Missouri--Columbiaeng
thesis.degree.levelMasterseng
thesis.degree.nameM.S.eng


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