Browsing Chemical Engineering electronic theses and dissertations (MU) by Title "Designing, modeling, manufacturing, and testing an atomic layer deposition system"
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Designing, modeling, manufacturing, and testing an atomic layer deposition system
(University of Missouri--Columbia, 2015)There are multiple techniques for depositing thin films in nanoelectronics and semiconductor industries. Each technique has its own advantage and disadvantage. Of the many techniques, chemical deposition is the most favorable ...