Amorphous silicon germanium oxide (Si[sub]xGe[sub]yO[sub]1-x-y) thin films for uncooled infrared microbolometer

Abstract

[ACCESS RESTRICTED TO THE UNIVERSITY OF MISSOURI AT REQUEST OF AUTHOR.] This dissertation presents a detailed characterization of amorphous Silicon Germanium Oxide (Si-Ge-O) thin films for uncooled infrared (IR) microbolometers. Every object, whose temperature is more than absolute zero, radiates IR radiation. Uncooled infrared microbolometer can detect that IR radiation and can be used for thermal imaging. Such IR imaging cameras detect variations in heat and create an electronic image of everything in view. These cameras have many important applications in both the commercial and defense sectors including automotive and truck safety, medical diagnostics, surgical interventions, surveillance, law enforcement, security, etc. Unlike many other infrared imaging products, microbolometers can operate at room temperature, resulting a significant cost reduction.