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dc.contributor.advisorKwon, Jae Waneng
dc.contributor.authorPottigari, Sai Sumantheng
dc.date.issued2008eng
dc.date.submitted2008 Falleng
dc.descriptionThe entire thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file; a non-technical public abstract appears in the public.pdf file.eng
dc.descriptionTitle from PDF of title page (University of Missouri--Columbia, viewed on October 7, 2009)eng
dc.descriptionThesis advisor: Dr. Jae Wan Kwon,eng
dc.descriptionAccess is limited to the campus of the University of Missouri-Columbia.eng
dc.descriptionM.S. University of Missouri-Columbia 2008.eng
dc.description.abstract[ACCESS RESTRICTED TO THE UNIVERSITY OF MISSOURI AT REQUEST OF AUTHOR.] A film bulk acoustic resonator (FBAR) is an acoustic resonator mass sensor using the resonance of longitudinal or shears acoustic waves. There is a significant Q factor loss in liquid medium due to acoustic energy loss. This drastically affects the minimum detectable mass of the sensor. This research describes the design and fabrication of an FBAR that has low loss in liquid environments. The new design utilizes a thin vacuum gap as an acoustic energy loss isolation layer of the FBAR in the aqueous media. The sensor was characterized and the Q factor was measured to be about 153 in the air and 140 in the water. An only 9% of Q reduction in the water was observed. This thesis also describes a novel temperature sensor which has been designed and fabricated by using a liquid metal, which connects a series of parallel-plate capacitors. Linearly and stably changing capacitance with respect to the temperature variation was observed from the sensor. The capacitance changes from about 0.015pF at 0[degree sign]C to about 0.322pF at 90[degree sign]C.eng
dc.description.bibrefIncludes bibliographical references.eng
dc.identifier.merlinb71554701eng
dc.identifier.oclc451643525eng
dc.identifier.urihttps://doi.org/10.32469/10355/6083eng
dc.identifier.urihttps://hdl.handle.net/10355/6083
dc.languageEnglisheng
dc.publisherUniversity of Missouri--Columbiaeng
dc.relation.ispartofcommunityUniversity of Missouri-Columbia. Graduate School. Theses and Dissertations. Theses. 2008 Theseseng
dc.rightsAccess is limited to the campus of the University of Missouri--Columbia.eng
dc.subject.lcshElectric resonatorseng
dc.subject.lcshElectric apparatus and applianceseng
dc.titleLow loss film bulk acoustic resonator in liquid environmentseng
dc.typeThesiseng
thesis.degree.disciplineElectrical and computer engineering (MU)eng
thesis.degree.grantorUniversity of Missouri--Columbiaeng
thesis.degree.levelMasterseng
thesis.degree.nameM.S.eng


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