Study of nuclear transmutation using cyclotron for post-CMOS activation of Beta emitters
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[ACCESS RESTRICTED TO THE UNIVERSITY OF MISSOURI AT REQUEST OF AUTHOR.] A study of post-CMOS fabrication process for radioisotope activation produced by nuclear transmutation is presented. Activation of the precursor occurs by nuclear transmutation and results in the desired beta emitting radioisotope. A microfabricated p-n diode on a silicon substrate coated with specific radioisotope precursors is used as the test basis of study. These results show promise for a broad impact in mass production of post-CMOS devices compatible with a simple radioisotope loading process on fully integrated chips.
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