Browsing Electrical Engineering and Computer Science publications (MU) by Identifier "0021-8979"
Now showing items 1-2 of 2
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Characterization of porous low-k films using variable angle spectroscopic ellipsometry
(American Institute of Physics, 2006)Variable angle spectroscopic ellipsometry (VASE™) is used as a tool to characterize properties such as optical constant, thickness, refractive index depth profile, and pore volume fraction of single and bilayer porous low-k ... -
Crystallization of amorphous silicon by self-propagation of nanoengineered thermites
(American Institute of Physics, 2007)Crystallization of amorphous silicon (a-Si) thin film occurred by the self-propagation of copper oxide/aluminum thermite nanocomposites. Amorphous Si films were prepared on glass at a temperature of 250 °C by plasma ...