Browsing Electrical Engineering and Computer Science publications (MU) by Title "Electric field and temperature-induced removal of moisture in nanoporous organosilicate films"
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Electric field and temperature-induced removal of moisture in nanoporous organosilicate films
(American Institute of Physics, 2004)The effects of bias-temperature-stress (BTS) or simply temperature-stress (TS) on nanoporous low-k methylsilsesquioxane films are studied. Initially, the as-given and O2 ashed/etched films exhibit physical adsorption of ...