Browsing College of Engineering (MU) by Identifier "0884-2914"
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Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics
(Materials Research Society, 2004)We present a supercritical CO2 (SCCO2) process for the preparation of nanoporous organosilicate thin films for ultralow dielectric constant materials. The porous structure was generated by SCCO2 extraction of a sacrificial ...