Electric field and temperature-induced removal of moisture in nanoporous organosilicate films

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Electric field and temperature-induced removal of moisture in nanoporous organosilicate films

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dc.contributor.author Biswas, N.
dc.contributor.author Lubguban, J. A.
dc.contributor.author Gangopadhyay, Shubhra
dc.date.accessioned 2010-08-12T15:46:11Z
dc.date.available 2010-08-12T15:46:11Z
dc.date.issued 2004-05-07
dc.identifier.citation Appl. Phys. Lett. 84, 4254 (2004) en
dc.identifier.issn 0003-6951
dc.identifier.uri http://hdl.handle.net/10355/8205
dc.description doi:10.1063/1.1757019 en
dc.description.abstract The effects of bias-temperature-stress (BTS) or simply temperature-stress (TS) on nanoporous low-k methylsilsesquioxane films are studied. Initially, the as-given and O2 ashed/etched films exhibit physical adsorption of moisture as revealed from the electrical behavior of the samples after 15 days. The temperature stressing at 170 °C volatilized the adsorbed water but is unable to remove chemisorb and hydrophillic Si-OH groups. As a result, the TS films remain susceptible to moisture. BTS at 170 °C also removes adsorbed water. More important, the surfaces under the metal-insulator structure were dehydroxylated by breaking the chemisorb Si-OH group facilitating the formation of siloxane bonds that prevents adsorption of moisture even after 60 days. en
dc.description.sponsorship The authors would like to acknowledge Dorel Toma of TEL for providing the samples, and SRC and NSF for funding this research. en
dc.language.iso en_US en
dc.publisher American Institute of Physics en
dc.relation.ispartof Electrical and Computer Engineering publications en
dc.subject nanoscale materials en
dc.subject adsorption kinetics en
dc.subject nanoporous materials en
dc.subject high-temperature effects en
dc.subject.lcsh Thin films en_US
dc.subject.lcsh Porous materials en_US
dc.title Electric field and temperature-induced removal of moisture in nanoporous organosilicate films en
dc.type Article en
dc.relation.ispartofcommunity University of Missouri-Columbia. College of Engineering. Department of Electrical and Computer Engineering


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