Browsing Missouri Technology Expo 2010 (MU) by Title "SiCON nanocomposite dielectric thin film [abstract]"
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SiCON nanocomposite dielectric thin film [abstract]
(2010-10)SiCON is a nanocomposite thin film consisting of silicon dioxide, silicon carbide, and carbon nitride nanostructures deposited by plasma-enhanced chemical vapor deposition. SiCON harnesses the beneficial characteristics ...