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Metasurface integrated uncooled silicon germanium oxide microbolometers for long wavelength infrared detection
(University of Missouri--Columbia, 2022)
]m. The voltage noise power spectral density (PSD) of the fabricated devices were reduced by annealing the devices in vacuum. In addition, the measured TCR, thermal conductance Gth, and absorptivity were 2.5 percent/K, 4.44x10-8 W/K, and 39 percent, respectively...
Impedance and plasmonic based MEMS sensors for chemical and biological applications
(University of Missouri--Columbia, 2020)
electrode array (IDE array) with 10-finger pairs. The device was fabricated using microfabrication techniques such as photolithography, wet etching and surface plasma treatment. Initially three types of Salmonella antibodies (type B, D and E) were mixed...
Optical and impedance based sensors for chemical/biological and foodborne pathogens applications
(University of Missouri--Columbia, 2023)
regions, each consists of interdigitated electrode array (IDE array) with 10-finger pairs. Microfabrication techniques such as photolithography, sputter-deposition, wet etching and surface plasma treatment were utilized to fabricate the sensor. The three...