Browsing 2013 MU dissertations - Freely available online by Identifier "https://hdl.handle.net/10355/44660"
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Surface micromachined MEMS variable capacitor with two-cavity for energy harvesting
(University of Missouri--Columbia, 2013)In this research, a novel MEMS variable capacitor with two capacitive cavities for energy harvesting was developed that use the wasted energy associated with undesirable mechanical vibrations to power microelectronic sensors ...