Browsing College of Engineering (MU) by Title "Characterization of porous low-k films using variable angle spectroscopic ellipsometry"

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  • Characterization of porous low-k films using variable angle spectroscopic ellipsometry 

    Othman, Maslin, 1977-; Lubguban, J. A.; Lubguban, Arnold A.; Gangopadhyay, Shubhra; Miller, R. D.; Volksen, W.; Kim, H.-C. (American Institute of Physics, 2006)
    Variable angle spectroscopic ellipsometry (VASE™) is used as a tool to characterize properties such as optical constant, thickness, refractive index depth profile, and pore volume fraction of single and bilayer porous low-k ...